Forskning ved Københavns Universitet - Københavns Universitet

Forside

Scatterometry for optimization of injection molded nanostructures at the fabrication line

Publikation: Bidrag til tidsskriftTidsskriftartikelForskningfagfællebedømt

Standard

Scatterometry for optimization of injection molded nanostructures at the fabrication line. / Madsen, Jonas Skovlund; Jensen, Soren Alkaersig; Nakotte, Lars; Vogelsang, Arne; Thamdrup, Lasse Hojlund; Czolkos, Ilja; Johansson, Alicia; Garnaes, Jorgen; Nielsen, Theodor; Nygard, Jesper; Hansen, Poul Erik.

I: International Journal of Advanced Manufacturing Technology, Bind 99, Nr. 9-12, SI, 01.12.2018, s. 2669-2676.

Publikation: Bidrag til tidsskriftTidsskriftartikelForskningfagfællebedømt

Harvard

Madsen, JS, Jensen, SA, Nakotte, L, Vogelsang, A, Thamdrup, LH, Czolkos, I, Johansson, A, Garnaes, J, Nielsen, T, Nygard, J & Hansen, PE 2018, 'Scatterometry for optimization of injection molded nanostructures at the fabrication line', International Journal of Advanced Manufacturing Technology, bind 99, nr. 9-12, SI, s. 2669-2676. https://doi.org/10.1007/s00170-018-2665-7

APA

Madsen, J. S., Jensen, S. A., Nakotte, L., Vogelsang, A., Thamdrup, L. H., Czolkos, I., Johansson, A., Garnaes, J., Nielsen, T., Nygard, J., & Hansen, P. E. (2018). Scatterometry for optimization of injection molded nanostructures at the fabrication line. International Journal of Advanced Manufacturing Technology, 99(9-12, SI), 2669-2676. https://doi.org/10.1007/s00170-018-2665-7

Vancouver

Madsen JS, Jensen SA, Nakotte L, Vogelsang A, Thamdrup LH, Czolkos I o.a. Scatterometry for optimization of injection molded nanostructures at the fabrication line. International Journal of Advanced Manufacturing Technology. 2018 dec 1;99(9-12, SI):2669-2676. https://doi.org/10.1007/s00170-018-2665-7

Author

Madsen, Jonas Skovlund ; Jensen, Soren Alkaersig ; Nakotte, Lars ; Vogelsang, Arne ; Thamdrup, Lasse Hojlund ; Czolkos, Ilja ; Johansson, Alicia ; Garnaes, Jorgen ; Nielsen, Theodor ; Nygard, Jesper ; Hansen, Poul Erik. / Scatterometry for optimization of injection molded nanostructures at the fabrication line. I: International Journal of Advanced Manufacturing Technology. 2018 ; Bind 99, Nr. 9-12, SI. s. 2669-2676.

Bibtex

@article{ef00cf63e72144f5b9c6b9a396d80329,
title = "Scatterometry for optimization of injection molded nanostructures at the fabrication line",
keywords = "Scatterometry, Injection molding, Nanostructures, Metrology, Process control",
author = "Madsen, {Jonas Skovlund} and Jensen, {Soren Alkaersig} and Lars Nakotte and Arne Vogelsang and Thamdrup, {Lasse Hojlund} and Ilja Czolkos and Alicia Johansson and Jorgen Garnaes and Theodor Nielsen and Jesper Nygard and Hansen, {Poul Erik}",
note = "[Qdev]",
year = "2018",
month = dec,
day = "1",
doi = "10.1007/s00170-018-2665-7",
language = "English",
volume = "99",
pages = "2669--2676",
journal = "International Journal of Advanced Manufacturing Technology",
issn = "0268-3768",
publisher = "Springer",
number = "9-12, SI",

}

RIS

TY - JOUR

T1 - Scatterometry for optimization of injection molded nanostructures at the fabrication line

AU - Madsen, Jonas Skovlund

AU - Jensen, Soren Alkaersig

AU - Nakotte, Lars

AU - Vogelsang, Arne

AU - Thamdrup, Lasse Hojlund

AU - Czolkos, Ilja

AU - Johansson, Alicia

AU - Garnaes, Jorgen

AU - Nielsen, Theodor

AU - Nygard, Jesper

AU - Hansen, Poul Erik

N1 - [Qdev]

PY - 2018/12/1

Y1 - 2018/12/1

KW - Scatterometry

KW - Injection molding

KW - Nanostructures

KW - Metrology

KW - Process control

U2 - 10.1007/s00170-018-2665-7

DO - 10.1007/s00170-018-2665-7

M3 - Journal article

VL - 99

SP - 2669

EP - 2676

JO - International Journal of Advanced Manufacturing Technology

JF - International Journal of Advanced Manufacturing Technology

SN - 0268-3768

IS - 9-12, SI

ER -

ID: 210112796